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DOI:10.1364/AO.52.003662 - Corpus ID: 7805183
@article{Coupland2013CoherenceSI, title={Coherence scanning interferometry: linear theory of surface measurement.}, author={Jeremy Coupland and Rahul Mandal and Kanik Palodhi and Richard K. Leach}, journal={Applied optics}, year={2013}, volume={52 16}, pages={ 3662-70 }, url={https://api.semanticscholar.org/CorpusID:7805183}}- J. Coupland, Rahul Mandal, R. Leach
- Published in Applied Optics 1 June 2013
- Engineering, Physics
A difference between the filter characteristics derived in each case is found and the equivalence of the two approaches when applied to a weakly scattering object is explained.
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61 Citations
- Matthew ThomasRong SuN. NikolaevJ. CouplandR. Leach
- 2019
Engineering, Physics
Optical Metrology
Coherence scanning interferometry (CSI) is a well-established technique for measuring surface topography based on the coherence envelope and phase of interference fringes. The most commonly used…
- Rahul MandalJ. CouplandR. LeachD. Mansfield
- 2016
Physics, Engineering
When applied to the measurement of smooth surfaces, coherence scanning interferometry can be described by a three-dimensional linear filtering operation that is characterized either by the…
- 2
- PDF
- Rahul MandalJ. CouplandR. LeachD. Mansfield
- 2014
Engineering, Physics
Applied optics
A new method of calibration and adjustment using a silica micro-sphere as a calibration artifact is introduced and a straightforward method to correct for phase and amplitude imperfections in the TF is described using a modified inverse filter.
- 40
- PDF
- T. PahlSebastian HagemeierMarco KünneDi YangP. Lehmann
- 2020
Engineering, Physics
Optics express
A rigorous simulation model is applied considering both the transfer characteristics of the measurement instrument as well as the geometry and material of different measurement objects to analyze systematic deviations in optical profilers.
- 20
- PDF
- Matthew ThomasRong SuN. NikolaevJ. CouplandR. Leach
- 2020
Engineering, Physics
Optical Engineering
Abstract. Coherence scanning interferometry (CSI), a type of interference microscopy, has found broad applications in the advanced manufacturing industry, providing high-accuracy surface topography…
- 26
- PDF
- T. PahlSebastian Hagemeier P. Lehmann
- 2021
Physics, Engineering
Optical Metrology
Coherence scanning interferometry is one of the most frequently used techniques for optical profiling due to its outstanding axial resolution. However, optical profilers suffer from systematic…
- 2
- Helia HooshmandT. Pahl S. Piano
- 2023
Engineering, Physics
Optical Metrology
Coherence scanning interferometry (CSI) is a widely used optical method for surface topography measurement of industrial and biomedical surfaces. The operation of CSI can be modelled using…
- P. LehmannT. PahlJ. Riebeling
- 2023
Physics, Engineering
Optical Metrology
Optical surface topography measurements sometimes suffer from systematic errors. In order to predict such deviations, modeling of optical profilers is a substantial part of the European project…
- Rong SuJ. CouplandR. Leach
- 2017
Physics, Engineering
Coherence scanning interferometry (CSI) is a well-established technique for 3D measurement of surface topography with sub-nanometre precision in the axial direction. As with most 3D optical imaging…
- PDF
- P. D. de GrootX. Colonna de LegaRong SuJ. CouplandR. Leach
- 2021
Physics, Engineering
Optical Engineering + Applications
We propose an instrument model for coherence scanning interferometry using familiar Fourier optics methods, the spectrum of plane waves, and the assumption that the light source spectral bandwidth is…
- 5
- PDF
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28 References
- K. PalodhiJ. CouplandR. Leach
- 2011
Physics
Coherence scanning interferometry (CSI) combines the lateral resolution of a high power microscope with the axial resolution of an interferometer and provides a rapid and convenient means to measure…
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Physics
In this paper, we characterize 3D optical imaging techniques as 3D linear shift-invariant filtering operations. From the Helmholtz equation that is the basis of scalar diffraction theory, we show…
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Physics, Engineering
Photonics Europe
This paper considers coherence scanning interferometry as a linear filtering operation that is characterised by a point spread function in the space domain or equivalently a transfer function in the…
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- P. D. RuizJ. M. HuntleyJ. Coupland
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Engineering, Physics
The last 5years have seen the emergence of a family of optical interferometric techniques that provide deformation measurements throughout three-dimensional (3-D) weakly scattering materials. They…
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- F. GaoR. LeachJ. PetzingJ. Coupland
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Physics, Engineering
This paper examines the performance of commercial scanning white light interferometers in a range of measurement tasks. A step height artefact is used to investigate the response of the instruments…
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In transmission microscopy, many objects are three dimensional, that is, they are thicker than the depth of focus of the imaging system. The three-dimensional (3-D) image-intensity distribution…
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Materials Science, Engineering
This guide describes good practice for the measurement and characterisation of rough surface topography using coherence scanning interferometry (commonly referred to as vertical scanning white light…
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Since in the experimental situation the scattered field data can only be determined in a very restricted range, a distinct smear of the PSF of this imaging process results, and the consequences of this drawback are described in terms of this PSF.
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Physics, Engineering
Applied optics
A system for fast three-dimensional profilometry, of both optically smooth and optically rough surfaces, based on scanning white-light techniques, using an efficient algorithm to extract and save only the region of interference, substantially reducing both the acquisition and the analysis times.
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